FR-Scanner ΑΙΟ-RO150

FR-Scanner AllInOne: the tool for automatic characterization of films and coatings on wafers, masks or other substrates. FR-Scanner is the ideal tool for the fast, accurate and non-destructive mapping of film properties: thickness, refractive index, uniformity, color etc. Wafers of any diameter (300mm max) and shape can be accommodated on the vacuum chuck.

FR-Scanner-AIO-RO150 operates in Polar Coordinates with unparalleled speed and accuracy in both radius & angle. Accurate reflectance data with high repeatability are recorded, making FR-Scanner the ideal tool for at-line and on-line characterization of films on wafers / other substrates at processing facilities.
It is offered in a wide range of configurations for the characterization of films as thin as few nanometers and thick as several hundreds of microns and is accompanied with a dedicated S/W for daily routine use. FR-Scanner provides excellent performance in terms of accuracy, precision, reproducibility and long-term stability.

The FR-Scanner-AIO-RO150 platform is offered in a very wide range of implementations covering a wide spectral range (200-1700nm) and thickness range.

FR-Scanner-AIO-Mic-XY200

FR-Scanner-AIO-Mic-XY200 is a holistic platform for the fully-automated in-depth characterization of patterned single and multilayer coatings on wafers. It provides 200mm of travel along X and Y axes and is suitable for accurate while the measurements sample is secured on the stage through vacuum. The tool is offered in an endless range of optical configurations within the 200-1700nm spectral range.

FR-Scanner-AllInOne-Mic-XY200 integrates under the same roof state-of-the-art optical, electronic, and mechanical modules for the accurate & precise characterization of patterned films. Typical examples include (but are not limited to): micro-patterned surfaces, rough surfaces, and numerous others. The wafer is placed on a vacuum chuck that supports any wafer size up to 200mm diameter and is equipped with reflectance standards. The characterization is performed by a powerful optical module with a spot size as small as a few microns. The motorized XY stage provides travel of 200mm on each axis with unprecedented speed, accuracy & repeatability.

FR-Scanner-AIO-Mic-XY200 Porvides:

• Real-time spectroscopic reflectance measurements
• Film thickness, optical properties, non-uniformity measurements, thickness mapping
• Imaging with integrated high-quality color camera
• Wide range of statistics for the parameters under characterization
• Semi-automatic pattern alignment capability for mapping of periodic small patterns
• Unique S/W features such as: Click2Move, Scale bar

FR-Scanner-AIO-Mic-XY300

FR-Scanner-AIO-Mic-XY300 is a holistic platform for the fully-automated in-depth characterization of patterned single and multilayer coatings on wafers. It provides true 300mm of travel along X and Y axes and is suitable for accurate measurements while the sample is secured on the stage through vacuum. The tool is offered in a wide range of optical configurations within the 200-1700nm spectral range.

FR-Scanner-AllInOne-Mic-XY300 integrates under the same roof state-of-the-art optical, electronic, and mechanical modules for the accurate & precise characterization of un-patterned and patterned films (e.g. micro-patterned surfaces, rough surfaces, etc.).

The wafer is placed on a vacuum chuck (wafer size with ≤ 300mm diameter) and equipped with reflectance standards. The characterization is performed by a powerful optical module with a spot size as small as a few μm. The motorized XY stage provides 300mm travel on each axis with unprecedented speed, accuracy & repeatability.

FR-Scanner-AIO-Mic-XY300 provides:

• Real-time spectroscopic reflectance measurements
• Film thickness, optical properties, non-uniformity measurements, thickness mapping
• Imaging with integrated high-quality color camera
• Wide range of statistics for the parameters under characterization
• Semi-automatic pattern alignment capability for mapping of periodic small patterns
• Unique S/W features such as: Click2Move, Scale bar